- Temperature range : 150-600℃, 600~900℃
- Additive : NaOH, KOH, NaCl, NaCN, CaCl2 ...etc.
- Retort materials : Stainless steel, Inconel
- Inner retort size(mm) : 200dia × 300(H)
250dia × 350(H)
300dia × 400(H)
200(W) × 200(D) × 300(H)
250(W) × 250(D) × 350(H)
300(W) × 300(D) × 400(H)
Custom built size
- Type of Furnace : Special top loading chamber furnace
with salt bath retort
- Temperature range : 20 up to 200℃
- Interior size(mm) : 350(L) × 290(W) × 140(H)
- Stainless steel, corrosion resistant.
- Gas control system : H2, N2, Ar
- 1500℃ Vacuum furnace : 10-7 Torr
- H2/O2 Analyser system
- H2 Burn-off system
- Gas 분위기 Vertical Tube Furnace
- H2, N2, O2, Quartz loading system
- Ar, O2 Gas 분위기 Tube Furnace
- Quartz special loading system
- 3-Quartz Tube with O2 gas
- Vacuum 10-3 Torr pressure control
- Wafer oxidation tube furnace
- Burning scrubber
- Wet scrubber
- 건식세정기
- Type : Sampling(흡입형), Diffusion(확산형)
- Gas : H2, CO, CO2, Cl2, Si2H6, SiH4, SO2, NH3, etc
